RF MEMS

A Study on the Test Technique for RF MEMS CPW Switch

射频微机械共面波导开关测试技术研究

Design and Optimization of a RF MEMS Variable Capacitor

一种射频微机械可变电容的设计与优化

RF MEMS filters using surface micromachining technology are new devices .

微波MEMS（RF-MEMS）滤波嚣是一种基于硅微加工技术的新型器件。

Design of RF MEMS resonator components based on cavity structure

基于腔结构的射频微机械谐振元件的设计

Study on key fabrication process of RF MEMS switch with cantilever structure

悬臂梁接触式RFMEMS开关的关键工艺研究

Theory and Analysis of Actuating Mechanism for RF MEMS Devices

RFMEMS器件驱动机制理论与分析

Research of Microwave Transmission Properties of Series and Shunt RF MEMS Switch

串并联RFMEMS开关的微波传输特性仿真研究

Performance analysis and comparison of semiconductor and RF MEMS switches

半导体开关与RFMEMS开关性能分析与比较

RF MEMS Switch and the Application Research in Phase Shifter

RFMEMS开关及其在移相器中的应用研究

Study on Fabrication Process of RF MEMS Switch and Test of Its DC Property

射频MEMS开关的制作工艺研究及其直流特性测试

Research and Process of RF MEMS Variable Capacitor s

微加工射频可变电容的研究与进展

Study on optimization of the RF MEMS distributed phase shifter

射频微机电分布式移相器设计优化研究

Fabrication of a RF MEMS Switch Using High k Materials as Dielectric Layer

高介电常数介质RFMEMS开关的制作研究

Technological Study of Fabrication of RF MEMS in Series

接触式串联射频MEMS开关的工艺研究

RF MEMS is from System to Single Chip

以MEMS技术实现射频单芯片

Mechanical Topology Optimization for Low Threshold Voltage Capacitive RF MEMS Switches

低驱动电压电容式RFMEMS开关结构设计优化

The subsystem of resource deployment ; RF MEMS Package Technology in Wireless Systems

资源配置子系统；射频MEMS封装技术

Study on the Computation of RF MEMS Switch 's Actuation Voltage

RFMEMS开关开启电压的计算方法研究

Study of RF MEMS Variable Capacitor and Voltage Controlled Oscillator

RFMEMS可变电容及压控振荡器的研究

A RF MEMS switch is designed by computer aided design ( CAD ) method .

应用计算机辅助设计（CAD）方法模拟设计一种射频微机械（RF-MEMS）开关。

The detailed electrical and mechanical analysis of RF MEMS switches . 4 .

对设计出的RFMEMS电容式开关进行了详细的机电分析。

Design of High Isolation Contact / Capacitive RF MEMS Switch with Wide Bandwidth

高隔离度宽频段组合式RF-MEMS开关的设计

Theoretical Optimization and Process Study on RF MEMS Varactors

RFMEMS压控电容理论优化和工艺研究

Key Technology and Devices of RF MEMS

RFMEMS的关键技术与器件

Electrostatic RF MEMS Switches Based on Mono Crystal Silicon Cantilever Structure

基于单晶硅梁的静电RFMEMS开关

Design and simulation of RF MEMS switch

RFMEMS悬臂梁开关的设计与仿真

Tech nology of RF MEMS Composition Technology of Frequency Power

射频功率合成技术

Analysis and Design of Capacitive Switches for Distributed RF MEMS Phase Shifters

基于分布式射频MEMS移相器电容开关的分析与设计

Recent Development on RF MEMS Switches in Japan

日本近年RFMEMS开关研究的进展

The Design and Simulation of RF MEMS Switches

低驱动电压的RFMEMS开关的设计与模拟